JPH0282767U - - Google Patents
Info
- Publication number
- JPH0282767U JPH0282767U JP16172788U JP16172788U JPH0282767U JP H0282767 U JPH0282767 U JP H0282767U JP 16172788 U JP16172788 U JP 16172788U JP 16172788 U JP16172788 U JP 16172788U JP H0282767 U JPH0282767 U JP H0282767U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- vacuum chamber
- evaporation
- thin film
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 4
- 238000001704 evaporation Methods 0.000 claims 4
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16172788U JPH0282767U (en]) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16172788U JPH0282767U (en]) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282767U true JPH0282767U (en]) | 1990-06-26 |
Family
ID=31444923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16172788U Pending JPH0282767U (en]) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282767U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5239584A (en) * | 1975-09-25 | 1977-03-26 | Hitachi Ltd | Vacuum evaporation apparatus |
-
1988
- 1988-12-12 JP JP16172788U patent/JPH0282767U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5239584A (en) * | 1975-09-25 | 1977-03-26 | Hitachi Ltd | Vacuum evaporation apparatus |